LEXT OLS5500 3D Optical Profilometer
Infinite Surfaces, Trusted Results
A hybrid 3D optical profilometer that unites laser scanning microscopy (LSM), white light interferometry (WLI), and focus variation microscopy (FVM) in one platform—delivering precise surface detail, traceable accuracy, and an intuitive user experience to streamline workflows from discovery to decision.
- Product Status: This product is a replacement for the LEXT OLS5100 and earlier OLS series systems.
LEXT OLS5500 3D Optical Profilometer
Industry Applications
Academia
Semiconductor
Electronics
Metals & Materials
Exceptional Precision Imaging
Infinite Surfaces, Trusted Results
The award-winning LEXT™ OLS5500 enables you to identify subtle features and surface variations with unparalleled clarity—use LSM, WLI, and FVM to detect defects, confirm designs, and make confident decisions.
Precision Across Every Surface
In-house engineered objective lenses maintain clarity and shape fidelity across the full field of view—even with highly sloped, reflective, or complex samples. Unlike conventional lenses that distort at the periphery, LEXT lenses deliver accurate measurements from center to edge.
White Light Interferometric Objectives
Ideal for smooth and sloped surfaces, the system measures nanometer-scale steps with reliable constant-height performance at any objective magnification.
Comparison images of a Fresnel lens sample taken with a conventional WLI 20X objective (left, NA 0.4) and Evident’s 20X WLI objective (right, NA 0.6).
"With the LEXT™ OLS5500, we can capture high-resolution 3D optical images and extract meaningful surface detail from delicate structures while minimizing sample handling and risk of damage."
Dr. Elliot Cheng
Centre for Microscopy & Microanalysis, University of Queensland
Clarity on Challenging Samples
4K imaging, a top-surface detection filter, laser DIC, dual pinhole optics, and a high-sensitivity sensor work together to deliver exceptional clarity, contrast, and color fidelity—even on the most challenging samples.
Comparison images of a polymer film. Left: laser image without DIC. Right: laser image with DIC.
Without Laser DIC
With Laser DIC
Comparison stitched images of a wafer. Left: without Intelligent Shading Correction. Right: with Intelligent Shading Correction.
Without Intelligent Shading
With Intelligent Shading
Seamless Large-Area Imaging
Produce clean, reliable large-area images with minimal stitching artifacts, even on low-contrast or uneven surfaces. Intelligent stitching and precise stage control ensure wide-field results that remain accurate, consistent, and presentation-ready.
Trusted Measurements
Accurate, Trusted Measurements
Fewer retests, reworks, and rejections with verified LSM, WLI and FVM measurements. The OLS5500 is the world’s first 3D optical profilometer that ensures guaranteed accuracy and repeatability* for both LSM and WLI measurements.
*Based on Evident’s internal research as of October 2025. The guaranteed accuracy and repeatability apply only if the device has been calibrated according to the manufacturer‘s specifications and is in defect free condition. Calibration must be performed by an Evident technician or an Evident-authorized specialist.
Illustration showing the difference between accuracy and repeatability.
Guaranteed Accuracy for Stitched Images
For large-area measurements, the OLS5500 ensures reliable stitched image data by combining a motorized stage with an integrated length-measuring module and advanced pattern matching. This approach delivers traceable, high-confidence stitched data in both LSM and WLI under specified stage conditions.
Service and Support That Empowers
When it comes to protecting your investment and the integrity of your research,
your needs come first. We stand behind our products with a commitment to prompt
service and technical support to help you achieve your goals.
Maintain compliance and system uptime with our on-site calibration, global service
network, and remote support—backed by 100+ years of expertise in microscopy.
Smarter Workflow
Smart Automation for Effortless Precision
The OLS5500’s smart automation and workflow tools are designed to make surface analysis easier and faster for users of all levels. With Tilt Adjustment Assistance, tilt correction becomes simple. With one click, the software indicates the exact amount of adjustment needed to level the sample surface.
WLI improves throughput up to 42×
The OLS5500’s WLI improves throughput by up to 42 times compared to conventional LSM. Measure nanometer-scale surface textures—traditionally visible only at the high magnifications of an LSM—without being limited by objective magnification.
Sample: 60 nm step height, measurement area: 1,280 µm.
LSM: Data acquisition time: 630 s; 6×6 stitched image acquired with an LSM 50X objective (NA 0.95).
WLI: Data acquisition time: 15 s; single image acquired with a WLI 10X objective (NA 0.3).
VLSI standard 83 nm height sample (MPLFLN10LEXT).
PEAK Algorithm for Fast, Precise 3D Reconstruction
The PEAK algorithm delivers highly accurate 3D surface data across low to high magnifications while significantly accelerating acquisition. For step-height and shape measurements, it intelligently skips nonessential Z-range scanning to capture precise results faster.
Smart Data Detection
Smart Judge automatically detects only reliable data, delivering accurate measurements without losing fine height irregularity data.
Left: Smart Judge off: Right: Smart Judge on.
Smart Judge Off
Smart Judge On
Applications
Resources
Product Resources
Videos
OLS5100 - Smart Experiment Manager Tolerance Judgement
OLS5100 - Smart Experiment Manager Change Your Workflow On the Fly
OLS5100 - Workflow Automation with the Macro Function
OLS5100 Experiment Total Assist
OLS5100 Smart Scan II
OLS5100 Real-time Macro Mapping
