Application Notes

Quality management in working with extra-fine tubes / Surface roughness analysis of a micro area using a laser microscope

Application

As the demand for smaller products continues to grow, parts used to make these products also become smaller. Such parts include probe cards for semiconductor inspection and extra-fine metal tubes used for medical equipment. Today, it’s possible to produce ultra-fine metal tubes with a diameter as small as 10μm, smaller than the diameter of a human hair. Producing these extremely fine metal tubes requires careful monitoring of the surface profile during the bending and drawing processes, the condition of electric discharge machining applied to the surface, and the state of the cutting surface. However, monitoring these conditions is problematic because the portions being machined are so small that conventional analytical methods cannot evaluate them properly.

Olympus' solution

Olympus 3D scanning laser microscope LEXT scans a micro area with a laser to measure the fine surface profile, or roughness. The microscope’s non-contact laser stylus accurately reproduces the shape of a micro area, something that is almost impossible to do using a contact-type probe. The horizontal resolution is 0.12 μm, and the step resolution is 5 nm. The measurement accuracy is traceable. These features make it possible to effectively monitor the surface profile of even very small parts.

Surface of a metal tube

surface of a metal tube_objective 20x_zoom 1x
20X objective lens; 1x zoom

surface of a metal tube_objective 100x_zoom 8x
100X objective lens; 8x zoom

Cutting surface evaluation

cutting surface evaluation_objective 20x_zoom 1x
20X objective lens; 1x zoom

cutting surface evaluation_objective 100x_zoom 2x
100X objective lens; 2x zoom

LEXT OLS5500

Hybrid 3D Optical Profilometer

  • Traceable surface measurements from the nanometer to micrometer scale
  • Laser scanning microscopy (LSM), white light interferometry (WLI), and focus variation microscopy (FVM) in one award-winning platform
  • First 3D optical profilometer to offer guaranteed accuracy and repeatability* for both LSM and WLI measurements
  • WLI mode delivers up to 40x faster measurement throughput than conventional LSM
  • Exceptional precision across surfaces with in-house engineered optics
  • Intuitive interface and smart automation streamline operation for users of all levels
  • AI-enhanced and high-throughput workflows with PRECiV™ software integration

*Based on Evident’s internal research as of October 2025. The guaranteed accuracy and repeatability apply only if the device has been calibrated according to the manufacturer’s specifications and is in defect free condition. Calibration must be performed by an Evident technician or an Evident-authorized specialist.

Learn More

LEXT OLS5100

The LEXT™ OLS5100 laser scanning microscope combines exceptional accuracy and optical performance with smart tools that make the system easy to use. The tasks of precisely measuring shape and surface roughness at the submicron level are fast and efficient, simplifying your workflow and delivering high-quality data you can trust.