White Paper
A Primer on White Light Interferometry and White Light Interferometric Objective Lenses
As miniaturization and precision engineering advance, traditional measurement techniques often fall short. White light interferometry (WLI) has emerged as the new standard for nanometer-level surface characterization, offering accurate and fast measurements without physical contact that could damage delicate samples. Whether you're inspecting semiconductor wafers, characterizing optical components, or validating micro-fabricated devices, understanding WLI technology is essential for maintaining competitive quality standards.
Access this exclusive white paper to learn more about the optical principles of white light interferometry and WLI objective lenses.
A Fresnel lens sample imaged with a conventional WLI 20X objective (NA 0.4, left image) and Evident’s 20X WLI Mirau objective (NA 0.6, right image).
What You'll Learn in This White Paper
- Principles of White Light Interferometry: How interference fringes enable sub-nanometer height resolution and why white light sources outperform monochromatic laser systems.
- Coherence-Scanning Interferometry (CSI): How envelope detection measures rough surfaces and step heights with high dynamic range.
- Phase-Shifting Interferometry (PSI): How phase detection achieves superior Z-resolution for smooth surface characterization.
- Configuration of White Light Interferometry Applied to a Microscope: How WLI systems integrate with microscope platforms using PZT scanners and beam splitters.
- White Light Interferometric Objectives: Michelson, Mirau, and Linnik Types: Compare three objective designs and learn which delivers optimal performance for your magnification, working distance, and numerical aperture requirements.
- Large Numerical Apertures in White Light Interferometry: How high NA Mirau objective lenses (up to 0.8) capture more light from steep slopes and complex geometries, enabling precise measurements previously impossible with conventional WLI optics.
Who Should Read This
Metrology engineers, quality control managers, R&D scientists, and manufacturing professionals in semiconductor fabrication, precision optics, MEMS development, materials science research, and any field requiring sub-micrometer surface characterization. Whether you're evaluating WLI systems for the first time or optimizing existing protocols, this primer provides foundational knowledge.
Download the Full White Paper
Get complete technical insights, detailed optical diagrams, and real-world imaging comparisons showing how WLI technology delivers nanometer-level precision for the most demanding surface metrology applications.