5G Device Measurement and Inspection Solutions
Fast Failure Analysis
Analyzing Semiconductor Wafers used in High-Frequency Devices
Challenges of Measuring Semiconductor Wafers
Wafers are typically inspected for defects using a metallurgical microscope. One common problem is that it is easy to lose sight of a defect when changing to a higher magnification objective to take a closer look.
Flexible Imaging for Fast Wafer Measurement
The DSX1000 digital microscope enables you to switch observations—such as differential interference contrast—with the touch of a button. In addition, the microscope’s optical zoom enables seamless macro to micro imaging, so you won’t lose sight of any defects.
Wafer defect DIC observation: An observation method suitable for visualizing nano-level irregularities, foreign matter, and scratches.
Observation of Resist Residues in Semiconductor Materials
Challenge of Optical Microscope Inspection
Even when an optical microscope is used, resist residue can be overlooked. It is important to choose a microscope with the right features for this application.
Easy Detection of Resist Residues
The BX53M upright metallurgical microscope supports fluorescence observation, offering an easy solution for the detection of organic resist residues with light-emitting properties. You can distinguish resist residues from other contamination by the differences in their emission characteristics.
MIX (fluorescence and darkfield) observation: Resist material in an integrated circuit (IC) pattern
MIX (fluorescence and darkfield) observation: Photoresist residue on a wafer sample
Observing the Molding Condition of Optical Communication Waveguides
Inspection Challenges Using a Digital or Measuring Microscope
It is possible to observe optical waveguides using a transmitted-light measuring microscope or a traditional digital microscope, however, the observation image will typically be blurry or unclear.
Clear Observation of the Molding Condition
When combined with the DP75 digital microscope camera, the BX53M upright metallurgical microscope’s high optical performance and differential interference contrast function enable you to clearly observe and capture high-resolution images of the molding condition of an optical waveguide.
